本文设计了基于ARM Cortex-M3核、针对上称重法激光晶体的生长的控制方案硬件平台,运用模糊PID自适应控制算法对称重信号进行模糊处理确定晶体生长瞬间所需的温度场,根据生长模型在理论上进行了仿真,并实际运用到TDL-J50型激光单晶炉设备,实现了激光晶体的瞬时生长速率的精确而平稳的自动控制.
Fuzzy PID control system based on ARM Cortex-M3 core has been designed for the process of pulling technique of laser crystal.The temperature distribution for the crystal growth can be determined by adapting Fuzzy PID control algorithm on the weighing singnal.According to the growth model,the simulation has been finished theoretically, the systerm has been used in TDL-J50 practically,and the accurate and stable control of crystal growing instantaneous rate for Fuzzy PID control during the crystal growing process was realized.
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