随着氢燃料电池技术在汽车应用中的日益完善,对高性能氢敏元件的需求也更加迫切.本文介绍了采用不同工作原理制备的氢敏元件的种类,着重描述了半导体薄膜材料的工作原理和改性途径,并针对我国目前研究较少的Ga2O3新型薄膜材料进行了较为详细的综合论述.
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