在GCr15轴承钢基体上,利用多弧离子镀技术低温(175℃)沉积TiAlCN涂层.利用SEM、EPMA、XRD、附着力测试仪、纳米压痕仪和UMT-2高温摩擦磨损测试仪研究薄膜性质.结果表明,涂层表面光滑平整、均匀致密且无明显孔洞.涂层表面存在一定数量的液滴颗粒,薄膜厚度约为2 μm.在涂层中,发现了晶体结构为fcc-TiN结构,薄膜的晶粒大小为10～30 nm;随着薄膜中C元素的加入,XRD谱中(Ti0.5,Al0.5)N峰出现了宽化;在TiAlN中引入C,附着力下降,随着涂层中C含量的增加,薄膜中的A1和Ti比例未发生明显变化,附着力略微增加,但硬度和弹性模量先增加后减小,摩擦系数一直减小.
The composite TiAlCN films were deposited by vacuum arc ion plating on GCr15 rings at 175 ℃.The properties of the films were characterized by SEM,EPMA,XRD,adhesion tester,nano-hardness tester and UMT-2 high temperature tribometer.The results indicate that the surface of the films is smooth and dense without any obvious pores.There are a certain number of droplets on the surface of films.The thickness of the films is about 2 μm.The fcc structure of TiN is found in the films.The grain size of the films is from 10 to 30 nm.With the addition of C element into the film,(Ti0.5,Al0.5)N peak in XRD patterns appears in width.After adding C into TiAlN,the adhesion of the films declines.However,the adhesion increases slightly along with the increase of the C content,but Al and Ti ratio does not change significantly.Besides,the hardness and elastic modulus increase first and then decreases,and the friction coefficient is always declined.
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