为了提高金刚石膜的红外透过率和高温抗氧化性能,采用纯钇(Y)金属靶,使用直流反应磁控溅射法在光学级金刚石自支撑膜表面制备了Y2O3薄膜.对比研究了光学级金刚石自支撑膜和Y2O3/Diamond/Y2O3复合窗口的高温抗氧化性能,及氧化前后样品表面形貌和红外透过率的变化情况.热分析、扫描电子显微镜和傅立叶变换红外光谱仪的研究结果表明Y2O3薄膜对光学级金刚石膜有非常好的抗氧化防护性能,在高达950℃的温度暴露30s后对光学级金刚石膜表面没有造成明显损伤,且仍能保持良好的增透效果(透过率超过80%).
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