使用金属离子注入的方法制备了Ti掺杂的DLC膜.采用原子力显微镜观察了薄膜的表面形貌,Ti掺杂后DLC膜的表面粗糙度明显减小,表面光洁度增加,颗粒细化.拉曼光谱分析表明实验获得的薄膜是典型的DLC膜,掺杂Ti后的DLC膜的拉曼光谱存在明显的肩峰,DLC膜化学结构中的sp2组分增加,sp3组分减少.透射电子显微镜分析表明Ti注入后有TiC纳米晶形成.掺入Ti的DLC膜的硬度从14GPa增加到20GPa.Ti掺杂后的DLC膜的摩擦系数(0.15)明显低于未掺杂的DLC膜的摩擦系数(0.21),Ti离子注入有助于提高薄膜的抗磨损性.
参考文献
| [1] | Donner C .[J].Surface and Coatings Technology,1998,100-101:180-186. |
| [2] | Robertson J .[J].Surface and Coatings Technology,1992,50:185-203. |
| [3] | Liu Y.;Meletis EI. .Tribological behavior of DLC coatings with functionally gradient interfaces[J].Surface & Coatings Technology,2002(2/3):178-183. |
| [4] | Yang W J;Choa Y H;Sekino T et al.[J].Thin Solid Films,2003,434:49-54. |
| [5] | Koumei B;Ruriko .[J].Surface and Coatings Technology,2002,158-159:373-376. |
| [6] | Kolitsch A;Summchen L;Ullmann J et al.[J].Surface and Coatings Technology,1996,84:495-499. |
| [7] | Robertson J .[J].Surface and Coatings Technology,1992,50:185-203. |
| [8] | Li L H;Zhang H Q;Zhang Y H et al.[J].Material Science and Engineering,2002,B94:95-101. |
| [9] | Robertson J .[J].Advances in Physics,1986,35(04):317-374. |
| [10] | Voevodin AA.;Laube SJP.;Donley MS.;Zabinski JS.;Capano MA. .DESIGN OF A TI/TIC/DLC FUNCTIONALLY GRADIENT COATING BASED ON STUDIES OF STRUCTURAL TRANSITIONS IN TI-C THIN FILMS[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(1/2):107-115. |
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