蓝宝石晶体因优异的综合性能被广泛用于航空航天等高性能要求领域.泡生法是目前生产大直径蓝宝石单晶的主要方法,热场对生产工艺、产品质量和单晶炉功率具有重要影响;并将影响生产成本.本文对氧化锆及钼金属组合式热屏中氧化锆材料内置、外置及材料不同组合方式对泡生法蓝宝石单晶炉功率的影响进行研究,得到合理的热场结构;并与实际生产结果进行验证.结果表明:相比于传统的15层钼保温结构,加入氧化锆保温层会明显降低单晶炉能耗,其中氧化锆内置的热场结构对单晶炉能耗降低影响更为明显;随着氧化锆层由0增加至15层,单晶炉能耗显著降低,相比传统15层钼保温结构,15层氧化锆保温结构炉体功率降低了38%.
Sapphire crystal has widely used in the aerospace and other high performance requirements for the excellent comprehensive performance.Kyropoulos method is a main method for producing large diameter sapphire single crystal;the heat shield shows an important influence onthe power of sapphire single crystal furnace.The effect of sapphire single crystal furnace power containing of the zirconia material heat shield in internal and external materials with different proportions is studied in this paper.The design of the most reasonable structure of the thermal field is verified as comparison with the tests results.The results show that: compared to the traditional molybdenum insulation structure of 15-layers, adding zirconia insulation layers will reduce the single crystal furnace energy consumption.However, the built-in oxidation hopper structure presents an obvious effect on the energy consumption of single crystal furnace.With the increase of the number of zirconia layers, the energy consumption of the single crystal furnace is greatly reduced, 15-layer zirconia insulation structure furnace power reduced by 38% compared with the traditional 15-layer molybdenum insulation structure.
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