阐述了Monte Carlo方法在薄膜生长中的应用和最新进展;简要论述了Monte Carlo算法的类型及各自的特点;结合MonteCarlo方法的特点,提出了模拟薄膜生长的模型以及处理方法.同时,归纳出MonteCarlo模拟薄膜生长需要解决的主要问题.
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