本文报道用离子束溅射法在单晶Si(100)衬底上沉积YBaCuO超导薄膜的实验结果。Y稳定ZrO_2层作为衬底和超导膜的中间层,具有良好的扩散阻止效果。薄膜具有强烈的c轴织构,其化学组成接近123相。薄膜的超导起始转变温度为100K,零电阻温度为78K。
We report the experimental results of the prepartion of YBaCuO superconductorthin film on Si (100) substrate by the method of ion beam sputtering deposition. A ZrO_2 buf-fer layer was applied to Si (100) substrate, and was found to play an important role in resist-ing the diffusion of Si toward the film. The thin film is mainly a 123 phase with strong c-axispreferred orentation. The onset transition temperature of the film is 100 K and the finaltransition temperature 78 K.
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