采用液相自组装法,Bi(NO3)3·5H2O,Fe(NO3)3· 9H2O为原料,柠稼酸为螯合剂,以OTS单分子层为模板,在ITO玻璃基片上成功制备了BiFeO3晶态薄膜.研究了前驱液pH值对BiFeO3薄膜的影响.利用XRD,EDS和SEM等测试手段对在不同pH值下沉积的BiFeO3薄膜进行了表征.结果表明,由于Bi3+络合物比Fe3+络合物的成核速率快,在pH值为1.5,Fe3+/Bi3+摩尔比为2.6时得到了纯相BiFeO3薄膜;随着pH值的增大,需要增大前驱液中Fe3+/Bi3+摩尔比才能得到纯相BiFeO3薄膜;该工艺制备BiFeO3薄膜适宜的pH值范围为1.50~1.65,在这个范围内沉积的BiFeO3薄膜都很致密.
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