回顾和评述了柔性衬底氧化物透明导电膜(包括锡掺杂的三氧化二ITO薄膜、铝掺杂的氧化锌AZO薄膜等)的研究进展情况.报道了在柔性衬底上制备的ITO膜、ZnO膜的光电性质对衬底种类、制备工艺以及制备参数的依赖关系,给出了在此领域内应进一步进行的工作.
参考文献
| [1] | John C C Fan .[J].Applied Physics Letters,1979,34(08):515-517. |
| [2] | Mansingh A;Vasant Kumar C V R .[J].THIN SOLID FILMS,1988,167:L11-L13. |
| [3] | Yamamoto S;Yamanaka T;Ueda Z .[J].Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films,1987,5(05):1952-1955. |
| [4] | Kulkarni AK.;Lim TS.;Khan M.;Schulz KH. .ELECTRICAL, OPTICAL AND STRUCTURAL CHARACTERISTICS OF INDIUM-TIN-OXIDE THIN FILMS DEPOSITED ON GLASS AND POLYMER SUBSTRATES[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(0):1-7. |
| [5] | MA Jin;Li Shu Ying;Zhao Jun Qing et al.[J].Thin Solid Films,1997,307:200-202. |
| [6] | Mukherjee A .[J].真空,1989,39(06):537-540. |
| [7] | Chiou B S;Hsieh S T .[J].THIN SOLID FILMS,1993,229:146-155. |
| [8] | MAJin;ZhangDH;LiSY et al.[J].Japanese Journal of Applied Physics,1998,37:5614-5617. |
| [9] | Ma Jin;Zhao Junqing;Tan Chuenyu;Yang Tianlin;Ma Honglei;Zhang Dehang .Preparation and characterization of ITO films deposited on polyimide by reactive evaporation at low temperature[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1999(3):239-243. |
| [10] | Yang ZW.;Yang TL.;Ye LN.;Ma HL.;Cheng CF.;Han SH. .ITO films deposited on water-cooled flexible substrate by bias RF Magnetron Sputtering[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(1/2):279-285. |
| [11] | Yang Z W;Hah S H;Yang T L et al.[J].Thin Solid Films,2000,366:4-7. |
| [12] | Ridge M I;Stenlake M;Howson R P et al.[J].THIN SOLID FILMS,1981,80:31-39. |
| [13] | Yang T L;Zhang D H;Ma J et al.[J].Thin Solid Films,1998,326:60-62. |
| [14] | Zhang DH.;Ma J.;Wang QP.;Gao RW.;Ma HL.;Yang TL. .Preparation of transparent conducting ZnO : Al films on polymer substrates by r. f. magnetron sputtering[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(1/2):43-48. |
| [15] | Zhang DH.;Wang QP.;Zhang DJ.;Yang TL. .Electrical and optical properties of Al-doped transparent conducting ZnO films deposited on organic substrate by RF sputtering[J].Materials Chemistry and Physics,2001(1/3):233-238. |
| [16] | Sieber I;Wanderka N;Urban I et al.[J].Thin Solid Films,1998,330:108-113. |
| [17] | Addonizio M L;Antonaia A;Cantele G et al.[J].Thin Solid Films,1999,349:93-99. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%