用等离子体浸没离子注入与沉积（PIII&D）技术在AISI52100轴承钢表面成功合成了高硬耐磨的氮化钛（TiN）薄膜。膜层元素分布、化学组成和表面形貌分别用X射线衍射（XRD）、X光电子能谱（XPS）和原子力显微镜 （AFM）表征。合成薄膜前后试样的滚动接触疲劳寿命和摩擦磨损性能分别由球棒疲劳磨损试验机和球-盘磨损试验机测定；疲劳破坏后的微观形貌通过扫描电镜（SEM）观察；薄膜力学性能经纳米压痕和纳米划痕试验评价。结果表明，表面膜层中主要存在TiN相，同时含有少量的TO2和钛氮氧的化合物；在优化条件下，氮化钛膜层致密均匀，与基体结合良好，具有很高的硬度和杨氏模量，分别达到25 GPa 和350 GPa；最低摩擦系数由基体的0.92下降到0.2。被处理薄膜试件在90%置信区间下的最大L10、L50、La和L寿命较基体分别提高了5.5倍、2.8倍、2.3倍和2.2倍，疲劳寿命的分散性得到了显著改善.
Titanium Nitride (TiN) hard protective films were fabricated on AISI52100 bearing steel substrate employing plasma immersion ion implantation and deposition (PIII&D) technique. The TiN films have been characterized using a variety of test methods. X-ray diffraction (XRD) analysis indicates that PIII&D results in the formation of three varieties of titanium components in the surface layer, which has also been proved by X-ray photoelectron spectroscopy (XPS) combined with Ar sputtering. Atomic force microscope (AFM) has revealed the deposition of extremely smooth TiN films, having very high uniformity and compact density over large areas. The nanohardness (H) and the elastic modulus (E) of TiN films measurement indicates that the maximum H (E) value is 25GPa (350GPa), increased by 127.3% (59.1%). The friction and wear behaviors and rolling contact fatigue (RCF) life of these samples have also been investigated by ball-on-disc and three-ball-rod testers. Results show that the friction coefficient decrease from 0.92 to 0.2; the L10 、L50 、La and L RCF life of treated sample increases by 5.5, 2.8, 2.3 and 2.2 times, respectively. The RCF life scatter extent of treated sample is improved significantly.
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