离子束增强沉积Si,Al,Y复合薄膜对304不锈钢抗氧化性的影响

腐蚀学报（英文）, 1994, 6(1): 47-52.

离子束增强沉积Si,Al,Y复合薄膜对304不锈钢抗氧化性的影响

SYNTHESIS OF THIN FILMS WITH Si,Al AND Y BY IBED TO IMPROVETHE OXIDATION-RESISTANCE OF 304 STAINLESS STEEL

LI Hualong , HUANG Yuanwei , LIU Xianghuai , ZHANG Yunshu(Shanghai Institute of Metallurgy.Chinese Academy of Science

Keywords： :IBED , Si , Al , Y , 氧化

用离子束增强沉积方法,在304不锈钢表面上制备了Si,Y—Si,Al,Y-Al薄膜,研究了它们在950℃、1050℃空气中的氧化,并采用EPMA及SEM等技术分别对氧化产物进行了分析。对离子束增强沉积薄膜样品的抗氧化性、SiO2膜的形成过程及Y的作用进行讨论。

The Si, Y-Si, Al and Y-Al thin films have been synthesized on the surface of 304 stainless steel by IBED (Ion Beam Enhanced Deposition)technique,and their oxidation behavior have been studied at 950℃ and 1050℃. EPMA and SEM have been employed to character

参考文献

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离子束增强沉积Si,Al,Y复合薄膜对304不锈钢抗氧化性的影响

SYNTHESIS OF THIN FILMS WITH Si,Al AND Y BY IBED TO IMPROVETHE OXIDATION-RESISTANCE OF 304 STAINLESS STEEL

参考文献