铁电薄膜移相器研究进展

材料导报, 2007, 21(11): 20-24.

铁电薄膜移相器研究进展

余桉 ^1, , 杨传仁 ^2, , 张继华 ^3, , 陈宏伟 ^4, , 王波 ^5, , 张瑞婷 ^6,

1.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

2.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

3.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

4.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

5.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

6.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

基金项目: 国家重点基础研究发展计划(973计划)(5131) 国家自然科学基金(60607004)

关键词：移相器 , 铁电薄膜 , 相控阵天线 , BST可变电容 , BST薄膜

Research Development of Ferroelectric Thin Films Phase Shifters

铁电薄膜移相器响应速度快、成本低、功耗和体积小,是一种模拟移相器,非常适合应用于相控阵天线特别是共形阵天线.介绍了4种主要的铁电薄膜移相器的结构、原理、性能和特点,指出分布型和全通网络型铁电薄膜移相器具有良好的发展前景,并进一步总结了国内外研究现状和存在的问题,提出了今后的研究方向.

参考文献

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材料期刊网

铁电薄膜移相器研究进展

Research Development of Ferroelectric Thin Films Phase Shifters

参考文献