NiZn ferrite thin films were performed on glass substrates of 85 ℃ by spin spray plating method. X-ray diffraction patterns of the films show that the samples have a cubic spinel structure with no extra lines corresponding to any other phases between 75 ℃ and 85 ℃. As the pH value of oxidizing solution increases to 8.3, the saturation magnetization increases to 3.13×105 A/m and resistivity to 127 mΩ·cm. Film deposited at pH 7.8 has a smooth surface and definite columnar structure.The large wavy flakes were observed at pH 8.3. The high real part of complex permeability μ′ up to 36.1 and the imaginary part μ″ up to 53.2 were observed at 0.5 GHz by short microstrip line perturbation method. The μ″ of thin film has values higher than 20 at the frequencies between 0.5 GHz and 2 GHz, the film is a promising anti-noise material for high frequency applications.
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