TiAlN/CrAlN纳米结构多层膜的结构与性能

材料热处理学报, 2010, 31(8): 121-126.

TiAlN/CrAlN纳米结构多层膜的结构与性能

董松涛 ^1, , 喻利花 ^2, , 薛安俊 ^3, , 许俊华 ^4,

1.江苏科技大学材料科学与工程学院,江苏省先进焊接技术重点实验室,江苏,镇江,212003

2.江苏科技大学材料科学与工程学院,江苏省先进焊接技术重点实验室,江苏,镇江,212003

3.江苏科技大学材料科学与工程学院,江苏省先进焊接技术重点实验室,江苏,镇江,212003

4.江苏科技大学材料科学与工程学院,江苏省先进焊接技术重点实验室,江苏,镇江,212003

基金项目: 江苏省自然科学基金(BK2008240) 国家自然科学基金(50574044)

关键词： TiAlN/CrAlN纳米多层膜 , 显微硬度 , 微结构 , 抗氧化性能

Microstructure and properties of TiAlN/CrAlN nanostructured multilayer films

采用射频磁控溅射方法制备了单层TiAlN、CrAlN复合薄膜以及不同调制周期和不同层厚比(lTiAlN/lCrAlN)的TiAlN/CrAlN纳米结构多层膜.薄膜采用X射线衍射仪、扫描电子显微镜、显微硬度仪进行表征.结果表明:TiAlN、CrAlN复合薄膜和TiAlN/CrAlN多层膜均为面心立方结构,呈(111)面择优取向.TiAlN/CrAlN多层膜的择优取向与调制周期和层厚比无关.层厚比为1的TiAlN/CrAlN多层膜的硬度依赖于调制周期,在调制周期为8 nm时,达到最大;固定TiAlN的厚度为4 nm,改变CrAlN层的厚度,在研究范围内,多层膜的硬度随着CrAlN层厚度的增加而增加.探讨了多层膜的致硬机制.TiAlN/CrAlN多层膜抗氧化温度比其组成单层膜高了近200 ℃,并讨论了其抗氧化机制.

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