采用等离子体化学气相沉积(PECVD)方法在不锈钢柔性衬底上制备了不同厚度的硅基p+/n+隧穿结,应用于非晶硅/微晶硅叠层太阳电池,分析了其对太阳电池电学和光学特性的影响.发现p+层厚度增加后,电池的开路电压提高,短路电流密度减小;随着n+层厚度的变化,电池的短路电流密度和填充因子均存在一个最佳值.将优化后的p+/n+隧穿结分别应用于不锈钢衬底和聚酰亚胺衬底的非晶硅/微晶硅叠层太阳电池,分别获得了9.95%(AM0,1353 W/m2)和9.87%(AM0,1353 W/m2)的光电转换效率.
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