分析比较了两种不同类型化学气相沉积(CVD)法制备钨芯SiC纤维的反应器,提出了改进方法,设计了一种立式冷壁反应器,并对用CVD法制备钨芯SiC纤维的工艺进行了研究.运用扫描电镜观察了制备纤维形貌,并用Weibull统计方法分析了纤维强度与其形貌之间的关系.结果表明,在不同的氢气流量和氮气流量比下,沉积速率均随沉积温度的升高而增大.总反应在较低温度区受表面反应控制,在较高温度区受质量传输控制.纤维的断裂强度大致可分为高、中、低3个区,CVD-SiC纤维的强度与其微观形貌有密切关系,缺陷的多少决定纤维强度的高低.
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