采用化学镀工艺在P型(100)单晶硅表面制备了含P约7.31%(原子分数)的Co—P镀层,研究了镀层的显微结构、耐蚀性能和磁性。结果表明:Co-7.31%P镀层为密排六方结构,平均晶粒尺寸为24nm,表面均匀分布着微米级枯叶状团簇,团簇之间存在纳米级孔隙;镀层在10.0%NaOH溶液中耐蚀性最好,3.5%NaCl溶液中次之,1.0%H2SO4溶液中最差;室温下镀层表现出明显的磁各向异性,易磁化方向的饱和磁化强度和矫顽力分别为138.5A·m2/kg和25870.0A/m。
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