利用电阻式真空蒸镀系统制备出了颗粒锡膜,并通过场发射电子显微镜(FSEM)对其生长进行了表征.研究发现,锡膜的表面形貌与氧压及基片温度强烈相关.随着氧压升高,锡膜颗粒粒径减小,形状趋于规则;随着基片温度升高,锡膜颗粒趋于规则,粒径先增后减.就颗粒锡膜的连通性及气敏性进行了初步研究,成膜后高温退火有助于提高颗粒锡膜的连通性,200℃工作环境下膜对氧气具有相当高的气敏性.
参考文献
| [1] | Giaever I;Zeller H R .Superconductivity of small tin particles measured by tunneling[J].Physical Review Letters,1968,20(26):1504. |
| [2] | Abeles B;Ping Sheng;Coutts M D et al.Structural and electrical properties of granular metal films[J].Advances in Physics,1975,24(03):407. |
| [3] | Abeles B;Pinck H L;Gittleman J I .Percolation conductivity in W-Al2O3 granular metal films[J].Physical Review Letters,1975,35(04):247. |
| [4] | Ovchinnikov Y N .Conductivity of granular metallic films[J].Journal of Experimental and Theoretical Physics,2007,104(02):254. |
| [5] | Haesendonck C V;Bruynseraede Y .Evidence for an Anderson transition in granular Sn films[J].Physical Review B,1986,33(04):1684. |
| [6] | Yaung-Soo Kim .Variable range hopping in granular tin[J].Journal of the Korean Physical Society,1995,28(04):505. |
| [7] | Abeles B;Cohen R W et al.Enhancement of superconductivity in metal films[J].Physical Review Letters,1966,17(12):632. |
| [8] | Vo-Van Truong;Fernand E G;Giulio Bosi .Optical properties of granular tin films from 0.22 to 1.0μm[J].Applied Optics,1982,21(14):2508. |
| [9] | Knoedler C M;Richard F V .Voltage noise measurement of the vortex mean free path in superconducting granular tin films[J].Physical Review B,1982,26(01):449. |
| [10] | Akselrod S;Pasternak M .M(o)ssbauer-effect studies of the lattice dynamics of granular tin[J].Physical Review B,1975,11(03):1040. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%