采用溶胶-凝胶(sol-gel)法在玻璃衬底上制备了纳米ZnO掺铝薄膜,利用X射线衍射仪(XRD)和透射电镜(TEM)对薄膜的微观结构进行了系统的研究.结果表明,所有在玻璃衬底上生长的ZnO薄膜均具有c轴择优取向.掺杂量为2％(原子分数)时,Al在ZnO薄膜中达到最高水平.过量Al掺杂明显减弱薄膜的c轴择优取向.随着Al掺杂量的增加,ZnO晶粒进一步细化.其原因是未进入ZnO晶格的Al以非晶Al2O3的形式在ZnO晶界上形成了对晶界运动的钉扎,从而阻碍了ZnO晶粒进一步长大.
参考文献
| [1] | Klingshirn C F;Waag A;Hoffmann A.Zinc oxide:from fundamental properties towards novel applications[M].Beilin:Springer-Verlag,2010:325-345. |
| [2] | Clause C;Fallert J;Zhou H et al.sixty-five years of ZnO research-old and very recent results[J].Physical Status Solidi B Basic Research,2010,247(06):1424-1447. |
| [3] | 黄剑锋.溶胶-凝胶原理与技术[M].北京:化学工业出版社,2005:12-14. |
| [4] | Musat V;Teixeira B;Fortunato E;Monteiro RCC .Effect of post-heat treatment on the electrical and optical properties of ZnO : Al thin films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1/2):219-222. |
| [5] | Xue SW;Zu XT;Zheng WG;Deng HX;Xiang X .Effects of Al doping concentration on optical parameters of ZnO : Al thin films by sol-gel technique[J].Physica, B. Condensed Matter,2006(1/2):209-213. |
| [6] | 张凯红,靳正国,赵宏生.热处理气氛对ZnO透明导电膜性能的影响[J].功能材料,2009(10):1647-1649. |
| [7] | Paraguay D F;Morales J;Estrada L et al.Influence of Al,In,Cu and Sn dopants in the microstructure of zinc oxide thin films obtained by spray pyrolysis[J].Thin Solid Films,2000,366:16-27. |
| [8] | Suwanboon S;Ratana T .Effects of Al and Mn dopant on structural and optical properties of ZnO thin film prepared by sol-gel route[J].Walailak Journal of Science and Technology,2007,4(01):111-121. |
| [9] | Oral AY;Bahsi ZB;Aslan AH .Microstructure and optical properties of nanocrystalline ZnO and ZnO :(Li or Al) thin films[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2007(10):4593-4598. |
| [10] | T.SCHULER;T.KRAJEWSKI;I.GROBELSEK;M.A.AEGERTER .A Microstructural Zone Model for the Morphology of Sol-Gel Coatings[J].Journal of Sol-Gel Science and Technology,2004(1/3):235-239. |
| [11] | Maria G.Gust;neal D.Evans;Leslie A.Momoda .In-situ transmission electron microscopy crystallization studies of sol-gel-derived barium titanate thin films[J].Journal of the American Ceramic Society,1997(11):2828-22836. |
| [12] | Zhu MW;Xia JH;Hong RJ;Abu-Samra H;Huang H;Staedler T;Gong J;Sun C;Jiang X .Heat-activated structural evolution of sol-gel-derived ZnO thin films[J].Journal of Crystal Growth,2008(4):816-823. |
| [13] | I. Sieber;N. Wanderka;I. Urban;I. Dorfel;E. Schierhorn;F. Fenske;W. Fuhs .Electron microscopic characterization of reactively sputtered ZnO films with different Al-doping levels[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1998(2):108-113. |
| [14] | Hoch M H;Hartmann A J;Lamb R N et al.Selftexture in the initial stages of ZnO film growth[J].Journal of Physical Chemistry B,1997,101:8231-8236. |
| [15] | Wang J;Qi Y;Zhi Z;Guo J;Li M;Zhang Y .A self-assembly mechanism for sol-gel derived ZnO thin films[J].Smart Materials & Structures,2007(6):2673-2679. |
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