采用直流磁控溅射法分别在纳米晶体钛(nano-grained Ti,NG Ti)和粗晶粒工业纯钛(coarse-grained commercial pure Ti,CG Ti)表面沉积TiO2薄膜,用扫描电镜、原子力显微镜和X射线衍射仪分析了薄膜的表面形貌和晶体结构,用摩擦试验机、划痕仪和纳米压痕仪测量两种基材表面薄膜的摩擦学性能、膜/基界面结合力、纳米硬度.系统研究了钛基材微结构纳米化对薄膜形核、生长、晶体结构和力学性能的影响规律.结果表明:钛基材微结构纳米化,显著提高薄膜形核率,细化薄膜晶粒；显著促进薄膜由锐钛矿相向金红石相转变；大幅度提高薄膜纳米硬度、界面结合力、摩擦学性能.
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