采用直流反应磁控溅射方法制备了纳米WO3薄膜,研究了溅射气压对WO3薄膜的表面形貌和微结构的影响.利用X射线衍射仪和扫描电子显微镜对WO3的微结构进行了表征.采用紫外-可见分光光度计和循环伏安测试系统对样品的电致变色及响应时间性能进行了研究.结果表明,纳米WO3薄膜的微孔结构特征具有较大的比表面积,有利于改善其电致变色性能.当溅射气压为4Pa时,WO3薄膜在可见光区的电致变色平均调色范围达到了71.6％,并且其着色响应时间为5 s,漂白响应时间为16 s.
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