以钨酸钠和氯化钠为原料,采用水热法在硅基多孔硅上原位生长WO3纳米棒薄膜,制成p型多孔硅基-n型WO3复合结构气敏传感器.为了获得最大比表面积的复合形貌,详细研究了水热反应时间和温度对多孔硅基WO3复合结构显微组织表面形貌的影响.利用扫描电镜、粉末衍射等表征手段测试并分析了多孔硅基表面WO3纳米棒薄膜的形貌以及晶体结构,并测试了复合结构传感器在不同工作温度下的气敏响应特性,结果表明:该气敏传感器在室温下便对有毒气体NO2具有高灵敏度以及稳定的重复性.
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