采用射频反应磁控溅射工艺,以纯Zr为靶材,在WO3/ITO/Glass基片上采用不同工艺参数沉积ZrN_x薄膜,用紫外-可见分光光度计、循环伏安法、X射线衍射仪、扫描电镜等研究了ZrN_x薄膜的离子导电性能.研究结果表明,所制备的ZrN_x薄膜为非晶态,ZrN_x/WO_3/ITO/Glass复合膜的光学调节范围最大达57%以上,在离子传导过程中表现出良好的离子导电性能.
Using pure zirconium and chromium as targets,ZrN_x films were deposited on WO_3/ITO/Glass substrates by reactive magnetron sputtering.The films were analyzed by UV-Vis spectrophotometer,cyclic voltammetry (CV),X-ray diffractometer (XRD),FEG-SEM and so on.The ion conductor properties of the ZrN_x films were studied. The research results show that the ZrN_x films deposited by reactive magnetron sputtering are amorphous.The maximum optical modulation range of ZrN_x/WO_3/ITO/Glass device is more than 57%.The ZrN_x films exhibit good ionic conductivity in the ion conductive process.
参考文献
| [1] | C.G. Granqvist .Electrochromic devices[J].Journal of the European Ceramic Society,2005(12):2907-2912. |
| [2] | Mahajan, SS;Mujawar, SH;Shinde, PS;Inamdar, AI;Patil, PS .Structural, morphological, optical and electrochromic properties of Ti-doped MoO3 thin films[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2009(2):183-187. |
| [3] | S. Papaefthimiou;E. Syrrakou;P. Yianoulis .An Alternative Approach For The Energy And Environmental Rating Of Advanced Glazing: An Electrochromic Window Case Study[J].Energy and Buildings,2009(1):17-26. |
| [4] | Feng Wu;Yadong Liu;Renjie Chen;Shi Chen;GuoqingWang .Preparation and performance of novel Li-Ti-Si-P-O-N thin-film electrolyte for thin-film lithium batteries[J].Journal of Power Sources,2009(1):467-470. |
| [5] | Dillon AC;Mahan AH;Deshpande R;Parilla R;Jones KM;Lee SH .Metal oxide nano-particles for improved electrochromic and lithium-ion battery technologies[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(5):794-797. |
| [6] | 龚永锋,傅相锴,张树鹏,丁萍萍.星形网状聚合物电解质的制备及其离子导电性研究[J].功能材料,2006(11):1743-1745,1748. |
| [7] | 孙雷;史月艳 .[J].太阳能学报,1998,19(02):140-146. |
| [8] | Chang JF.;Hon MH.;Wang HL. .Studying of transparent conductive ZnO : Al thin films by RF reactive magnetron sputtering[J].Journal of Crystal Growth,2000(1/4):93-97. |
| [9] | 景怀宇,秦光荣,康志君,尉秀英.大吸气量新型吸氢材料的研究[J].稀有金属,2002(04):307-309. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%