多晶硅薄膜是集晶体硅材料和非晶硅氢合金薄膜优点于一体,在能源科学、信息科学的微电子技术中有广泛应用的一种新型功能材料.本文综述低温(＜600℃)制备高质量多晶硅薄膜技术的研究进展及其应用,着重讨论用等离子体化学气相沉积(PECVD)硅基薄膜固相晶化制备多晶硅技术及其在薄膜硅太阳能电池上的应用.
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