The article reviews the present state of the art in the magnetron sputtering of hart and superhard nanocomposite coatings. It is shown that there are (1) two groups of hard and superhard nanocomposites: (i) nc-MN/hard phase and (ii) nc-MN/soft phase, (2) three possible origins of the enhanced hardness: (i) dislocation-dominated plastic deformation, (ii) cohesive forces between atoms and (iii) nanostructure of materials, and (3) huge differences in the microstructure of single- and two-phase films. A main attention is devoted to the formation of nanocrystalline and/or X-ray amorphous films. Such films are created in a vicinity of transitions between (i)crystalline and amorphous phases, (ii) two crystalline phases of different chemical composition or (iii) two different preferred orientations of grains of the sane material from which the coating is composed. The existence of the last transition makes it possible to explain the enhanced hardness in single-phase films. The thermal stability and oxidation resistance of hard nanocomposite films is also shortly discussed.
参考文献
| [1] | H.Gleiter.[J].Progress in Materials Science,1989:223. |
| [2] | R Birringer.[J].Materials Science and Engineering:33. |
| [3] | R W Siegel.[J].Annual Review of Materials Science:559. |
| [4] | S A Barnett;M.H.Fracombe;J.A.Vossen.Physics of Thin Films[M].Academic Press,N.Y,1993:1. |
| [5] | R.W.Siegel .[J].Journal of Physics and Chemistry of Solids,1994,114:1097. |
| [6] | R W Siegel;G E Fougere.[J].Materials Research Society Symposium Proceedings:219. |
| [7] | H Gleiter.[J].Nanostructured Materials:3. |
| [8] | K·Lu.[J].Materials Science and Engineering:161. |
| [9] | B·X·Liu;O·Jin.[J].Physica Status Solidi:3. |
| [10] | S.Yip.[J].NATURE,1998:532. |
| [11] | S Veprek;P Nesládek;A Niederhofer;F.Glatz M.Jílek and M.Síma.[J].Surface and Coatings Technology:138. |
| [12] | J.Musil;J.Vlcek.[J].Materials Chemistry and Physics:116. |
| [13] | S Veprek;J Vac Sci.[J].Technology:2401. |
| [14] | A Niederhofer;K.Moto;P.Nesládek;S.Veprek M.Hrabovskj M.Konrád V.Kopecky.Proc.of the 14th International Symposium on Plasma Chemistry[A].Prague,Czech Republic,1999:1521. |
| [15] | J Musil.[J].Surface and Coatings Technology:322. |
| [16] | A.A.Voevodin;J.S.Zabinski.[J].THIN SOLID FILMS,2000:223. |
| [17] | H.Gleiter .Nanostructured materials: basic concepts and microstructure[J].Acta materialia,2000(1):1-29. |
| [18] | J Musil;J Vlcek.[J].Surface and Coatings Technology:557. |
| [19] | H.Gleiter.[J].Scripta Materialia,2001:1161. |
| [20] | S Veprek;A S Argon.[J].Surface and Coatings Technology:175. |
| [21] | V.V.Brazhkin;A.G.Lyapin;R.J.Hemley.[J].Philosophical Magazine,2002(02):231. |
| [22] | S Veprek;A S Argon.[J].Journal of Vacuum Science and Technology,2002(02):650. |
| [23] | J.Musil;J.Vlcek;F.Regent;F.Kunc and H.Zeman.[J].Key Engineering Materials:613. |
| [24] | H Gleiter;M Fichtner.[J].Scripta Materialia:497. |
| [25] | S Zhang;D Sun;Y Fu;H.Du.[J].Surface and Coatings Technology:113. |
| [26] | G.M.Demyashev;A.L.Taube;E.Siores;H.S.Nalwa.Handbook of Organic-Inorganic Hybrid Materials and Nanocomposites[M].American Scientifuc Publisher,Stevenson Ranch,CA,USA,2003:1. |
| [27] | G.M.Demyashev;A.L.Taube;E.Siores;H.S.Nalwa.Handbook of Organic-Inorganic Hybrid Materials and Nanocomposites[M].American Scientifuc Publisher,Stevenson Ranch,CA,USA,2004:1. |
| [28] | J Musil.Nanostructured Thin Films and Nanodispersion Strengthened Coatings[A].Kluwer Academic Publishers B.V.Dordrecht,The Netherlands,2004:43. |
| [29] | J Musil;A.Cavaleiro;J.T.M.De Hosson.Nanostructured Hard Coatings[M].Kluwer Academic/Plenum Publishers,New York,USA,2005 |
| [30] | S Veprek;A Niederhofer;K Moto;T Bolom H D Mannling P Nesládek G Dollinger and A Bergmaier.[J].Surface and Coatings Technology:152. |
| [31] | H.S.Kim.[J].Scripta Materialia,1998:1057. |
| [32] | G Weigang;H Hecht;G Minnigerode.[J].Zeitschrift für Physik:349. |
| [33] | U.Wahlstrom;L.Hultman;J.E.Sundgren;F.Abidi I.Petrov and J.E.Greene.[J].THIN SOLID FILMS,1993:62. |
| [34] | K Yamamoto;T Sato;M Takeda.[J].Surface and Coatings Technology:167. |
| [35] | H Hasegawa;A Kimura;T Suzuki.[J].Surface and Coatings Technology:76. |
| [36] | Y.Makino.[J].ISIJ International,1998(09):925. |
| [37] | J. Musil;H. Hruby .Superhard nanocomposite Ti{sub}(1-x)Al{sub}xN film prepared by magnetron sputtering[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1):104-109. |
| [38] | H.Poláková;J.Musil;J.Vlcek;J.Allaart and C.Mitterer.[J].THIN SOLID FILMS,2003:189. |
| [39] | J Musil;H Poláková;J Suna;J Vlcek.[J].Surface and Coatings Technology:289. |
| [40] | J Musil;P Zeman;H Hruby;P H Mayrhofer.[J].Surface and Coatings Technology:179. |
| [41] | P Zeman;R Cerstvy;P H Mayrhofer;C Miyyrtrt and J Musil.[J].Science and Engineering:189. |
| [42] | J Musil;J Vlcek;P Zeman;Y Setsuhara S Miyake S Konuma M Kumagai and C Mitterer.[J].Japanese Journal of Applied Physics:6529. |
| [43] | H S Myung;H M Lee;J G Han;L R Shaginyan.[J].Surface and Coatings Technology:591. |
| [44] | Z G Li;J L He;T Matsumoto;T Mori S Miyake and Y Muramatsu.[J].Surface and Coatings Technology:1140. |
| [45] | J G Han;H S Myung;H M Lee;L R Shaginyan.[J].Surface and Coatings Technology:738. |
| [46] | Eric A.Brandes in Association with Fulmer Research Institute Ltd Smithells Metals Reference Book[M].Butterworth Heinemann,London,1992:24. |
| [47] | N Jiang;Y G Shen;Y W Mai;T Chan and S C Tung.[J].Materials Science and Engineering:163. |
| [48] | M Diserens;J Patcheider;F Lévy.[J].Surface and Coatings Technology:241. |
| [49] | J Patscheider;T Zehnder;M Diserens.[J].Surface and Coatings Technology:201. |
| [50] | J.Patscheider.[J].MRS Bulletin:180. |
| [51] | M Naka;T.Shibayanagi;M.Maeda;H.Mori and Y.Ogata High Temperature Society of Japan.Proceedings of International Symposium on Environmental-Conscious Innovative Materials Processing with Advanced Energy Sources[C].Kyoto,Japan,1998:341. |
| [52] | S.Veprek;S.Reiprich.[J].THIN SOLID FILMS,1995:64. |
| [53] | S Veprek;A S Argon.[J].Journal of Vacuum Science and Technology,2002(02):650. |
| [54] | Z G Li;M Mori;S Miyake;M Kumagai H Saito and Y Muramatsu.[J].Surface and Coatings Technology:345. |
| [55] | F.Kauffmann;G.Dehm;E.Artz;V.Schier S.Henke A.Schattke and T.Beck Mat.R.K.Singh H.Hofmann M.Sena R.Patch and M.Muhamed.Res.Soc.Symp.Proc[M].PA,USA,2002:W7.3.1. |
| [56] | N Nose;W A Chiou;M Zhou;T.Mae and M.Meshii.[J].Journal of Vacuum Science and Technology,2002(03):823. |
| [57] | M Zhou;N Nose;Y Deguchi;T.Mae and K.Nogi.[J].Journal of Vacuum Science and Technology,2003(05):1791. |
| [58] | J.Musil;R.Daniel;P.Zeman;O.Takai.[J].THIN SOLID FILMS,2005:238. |
| [59] | H. Zeman;J. Musil;P. Zeman .Physical and mechanical properties of sputtered Ta-Si-N films with a high (≥40 at%) content of Si[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,2004(3):646-649. |
| [60] | J B Choi;K Cho;Y Kim;K H Kim and P K Song.[J].Japanese Journal of Applied Physics:6556. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%