采用直流磁控溅射法制备了B-C-N薄膜.通过改变基体偏压,研究其对薄膜的成分、结构和力学性能的影响.X射线光电子谱(XPS)和傅里叶变换红外光谱(FTIR)试验结果表明薄膜中存在着B-C,B-N,C-C和C-N键,说明薄膜中B,C,N 3种元素达到了原子级化合.随基体偏压增大,薄膜无序化程度增强.纳米硬度测试结果表明,随着基体偏压的增,纳米硬度和弹性模量不断增加.
参考文献
| [1] | 王蜀霞.Si（100）上异质外延金刚石膜生长及其应用研究[J].稀有金属材料与工程,2001(06):440-443. |
| [2] | Morian I et al.[J].Thin Solid Films,1999,340:95. |
| [3] | Wada Y et al.[J].Diamond and Related Materials,2000,9:620. |
| [4] | Ulrich S et al.[J].Diamond and Related Materials,1998,7:839. |
| [5] | Zu I F;Zho Bello;Lei M K et al.[J].Surface and Coatings Technology,2000,128-129:334. |
| [6] | Linss V;Rodil SE;Reinke P;Garnier MG;Oelhafen P;Kreissig U;Richter F .Bonding characteristics of DC magnetron sputtered B-C-N thin films investigated by Fourier-transformed infrared spectroscopy and X-ray photoelectron spectroscopy[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2004(1/2):76-87. |
| [7] | Tateyama Y.;Kusakabe K.;Tsuneyuki S.;Itoh S.;Ogitsu T. .PROPOSED SYNTHESIS PATH FOR HETERODIAMOND BC2N[J].Physical Review.B.Condensed Matter,1997(16):10161-10164. |
| [8] | Deyan He et al.[J].Applied Surface Science,2002,191:338. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%