采用化学气相沉积(CVD)聚合工艺制备的对苯撑二甲基聚合物可广泛应用在航天、航空、军工、电子、生物医学工程、控制系统、文物保护、纳米材料和磁性材料等诸多领域.综述了聚对苯(撑)二甲基系列膜的化学气相沉积聚合工艺和原理,介绍了底物温度和沉积舱压力等主要因素对膜沉积率的影响和膜的一些主要性能,并讨论了典型的Parylene N膜的光氧降解性能.
参考文献
| [1] | Gorham W F .[P].US 3342754,1967. |
| [2] | Waters J F;Sutter J K;Meador M A .Addition curing thermosets endcapped with 4-amino [2,2] paracyclophane[J].Journal of Polymer Science Part A:Polymer Chemistry,1991,29:1917. |
| [3] | Lahann J.;Hocker H.;Klee D. .Chemical vapour deposition polymerization of substituted [2.2]paracyclophanes[J].Macromolecular rapid communications: Publishing the newsletters of the European Polymer Federation,1998(9):441-444. |
| [4] | Mark H;Bikales N;Overterger G et al.Xylylene polymers[J].Encyclopedia of Polymer Science and Engineering,1985,17:991. |
| [5] | Yang GR.;Karcz J.;Gill WN.;Lu TM.;Ganguli S. .High deposition rate parylene films[J].Journal of Crystal Growth,1998(3):385-390. |
| [6] | Flory P J.Principles of Polymer Chemistry[M].Ithaca: Cornell University Press,1953:511. |
| [7] | Gorham W F .A new, general synthetic method for the preparation of linear poly-p-xylylens[J].Journal of Polymer Science Part A:Polymer Chemistry,1966,4:3027. |
| [8] | 肖意轩;钟溟;刘平生 .聚对苯撑二甲基膜的制备及其应用的初步研究[J].化学通报(印刷版),1989,5:48. |
| [9] | Fortin J B;Lu T M .Ultraviolet radiation induced degradation of poly-para-xylylene(paralene)thin films[J].Thin Solid Films,2001,397:223. |
| [10] | Bera M.;Gandon C.;Gardette JL.;Rivaton A. .Photooxidation of poly(para-xylylene)[J].European Polymer Journal,2000(9):1753-1764. |
| [11] | Bera M.;Gandon C.;Gardette JL.;Rivaton A. .Comparison of the photodegradation of parylene C and parylene N[J].European Polymer Journal,2000(9):1765-1777. |
| [12] | 陈曦.聚对二甲苯在电子领域中应用的新进展[J].电子工艺技术,2002(04):146-148. |
| [13] | Hubers HW.;Krabbe A.;Birk M.;Wagner G.;Semenov A. Gol'tsman G.;Voronov B.;Gershenzon E.;Schubert J. .Parylene anti-reflection coating of a quasi-optical hot-electron-bolometric mixer at terahertz frequencies[J].Infrared physics and technology,2001(1):41-47. |
| [14] | Yang LJ.;Lin WZ.;Yao TJ.;Tai YC. .Photo-patternable gelatin as protection layers in low-temperature surface micromachinings[J].Sensors and Actuators, A. Physical,2003(1/2):284-290. |
| [15] | Yang X;Yang J M;Tai Y C et al.Micromachined membrane particle filters[J].Sensors and Actuators A:Physical,1999,73(1-2):184. |
| [16] | Barie N;Rapp M;Siqrist H et al.Covalent photolinker-mediated immobilization of an intermediate dextran layer to polymer-coated surfaces for biosensing applications[J].Biosensors and Bioelectronics,1998(13):855. |
| [17] | Pornsin-sirirak T;Tai Y C et al.Titanium-alloy MEMS wing technology for a micro aerial vehicle application[J].Sensors and Actuators A:Physical,2001,89(1-2):95. |
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