针对一种进口和国产的ITO靶材，用AES(SEM、SAM)、XPS、UPS和XRD进行了比较研究，通过研究发现两种样品的差别，为提高国产靶材的质量，提供一些改进意见。
A domestic ITO target and a foreign ITO target were analyzed and compared using AES, XPS, UPS, SEM and XRD. The main differences between domestic and foreign targets were found. Some suggestions were proposed for improving the qualities of the domestic ITO target.
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