利用拉曼光谱结合X射线衍射分析对未掺杂和掺杂的ZnO薄膜、陶瓷薄膜进行了研究.ZnO薄膜及ZnO陶瓷薄膜均由sol-gel法制备,掺杂组份有Bi2O3、Sb2O3、MnO和Cr2O3等.结果表明,未掺杂的薄膜的ZnO主晶相均表现出显著的定向生长特征,其拉曼光谱特征谱峰为437cm-1,谱峰强度随薄膜退火温度的提高略有增强.掺杂后ZnO的拉曼谱峰发生了红移.掺Bi2O3后ZnO的拉曼谱峰由347cm-1移质移至434cm-1,掺Sb2O3后ZnO的拉曼谱峰移至435cm-1,而掺杂Bi2Os、Sb2O3、MnO和Cr2O3等组份的ZnO陶瓷薄膜的ZnO拉曼谱峰则移至434cm-1,说明掺杂元素进入了ZnO晶格,引起了晶格的变化.ZnO薄膜性能不仅受次晶相组成的影响,而且受因掺杂元素进入而引起的ZnO晶格畸变的影响.
参考文献
| [1] | Zayer N K;Greef R;Rogers K et al.[J].Thin Solid Films,1999,352:179-184. |
| [2] | Suzoki Y;Ohki A;Mizutani T et al.[J].Journal of Physics D:Applied Physics,1987,20:511-517. |
| [3] | Koshizaki N.;Oyama T. .Sensing characteristics of ZnO-based NOx sensor[J].Sensors and Actuators, B. Chemical,2000(1/3):119-121. |
| [4] | Bae SH.;Jin BJ.;Im S.;Lee SY. .Pulsed laser deposition of ZnO thin films for applications of light emission[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(0):458-461. |
| [5] | Ohyama M.;Yoko T.;Kozuka H. .Sol-gel preparation of transparent and conductive aluminum-doped zinc oxide films with highly preferential crystal orientation[J].Journal of the American Ceramic Society,1998(6):1622-1632. |
| [6] | HorioN;Hiramatsu M;Nawata M .[J].真空,1998,51(04):719-722. |
| [7] | 贾锐;曲凡钦;武光明 等.[J].功能材料,1999,30(06):636-638. |
| [8] | Huang Yaniu;Liu Meidong;Zeng Yike et al.[J].Materials Science and Engineering B,2001,86:232-236. |
| [9] | 程光煦.拉曼布里渊散射-原理及应用[M].北京:科学出版社,2001:744. |
| [10] | Exarhos GJ.;Windisch CF.;Rose A. .SPECTROSCOPIC CHARACTERIZATION OF PROCESSING-INDUCED PROPERTY CHANGES IN DOPED ZNO FILMS[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(0):56-62. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%