设计研制了大气开放式金属有机化合物气相沉积(AP-MOCVD)装置,该装置操作简便,制备条件易控制,可制备不同碳掺杂氧化钛和纯氧化钛薄膜.以XRD、AES、XPS和UV-vis对碳掺杂氧化钛薄膜表征表明,以大气开放式MOCVD法在玻璃基片上制备的碳掺杂氧化钛薄膜,碳均匀掺杂到氧化钛晶格中,氧化钛晶格中碳占据了氧的位置并形成Ti-C键.其紫外可见吸收光谱(UV-vis)吸收曲线相对于纯氧化钛薄膜明显红移,并提高可见光的利用率.以AP-MOCVD法制备的碳掺杂氧化钛薄膜具有显著的可见光催化活性,在可见光下能使空气中的甲醛明显的光催化降解.
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