利用非平衡磁控溅射技术在17-4PH不锈钢表面分别制备了TiO2膜、TiO2/Ti多层膜及TiO2/Ti/TiN/Ti多层膜,采用XRD、表面轮廓仪、显微硬度仪、摩擦磨损试验机和水蒸气疲劳腐蚀试验设备研究了薄膜的物相、显微硬度、耐磨性和耐疲劳腐蚀性能.结果表明:具有表面薄膜17-4PH不锈钢的硬度、耐磨性和耐腐蚀性能均有较大提高;与TiO2膜和TiO2/Ti/TiN/Ti多层膜相比,TiO2/Ti多层膜耐磨性能最好,较基体的提高了20倍以上,同时其耐疲劳腐蚀性能也最好.
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