概述了铁电薄膜在非易失存储器中的应用研究现状,将铁电存储器与其他类型存储器进行了比较,针对铁电薄膜在存储器中的应用,探讨了铁电薄膜制备工艺与半导体工艺兼容性、极化疲劳、尺寸效应等几方面的问题,指出了当前研究的重点.
The applications of ferroelectric thin films, especially the application in non-volatile random access memories are reviewed in this paper. The differences between ferroelectric random access memories and other type memories are analyzed. The processing compatibility between ferroelectric thin films and semiconductor technology, polarization fatigue, size effects are discussed in terms of the ferroelectric thin film application in memories, and they are thought to be the priority research topics at present.
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