随着热电材料与薄膜制备技术和性能研究手段的发展,具有高热电性能的纳米超晶格热电薄膜已受到人们的关注.简要介绍了超晶格热电薄膜的理论研究、制备和分析测试技术,指出了超晶格热电薄膜主要应用环境和存在的问题以及可能的发展方向.
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