利用脉冲激光沉积法制备了ZnO∶Al透明导电薄膜.通过对膜的霍尔系数测量及 AFM、XRD分析,详细研究了温度和退火处理对薄膜结构、表面形貌及光电性能的影响.结果表明沉积温度影响膜的电学、光学性能和膜的结晶状况.制备的薄膜均具有ZnO(002)择优取向的多晶膜.在240～310℃沉积的薄膜具有最低的电阻率,其值为6.1×10-4Ω·cm,在240℃沉积的薄膜在氩气中退火薄膜的电阻率下降为4. 7×10-4Ω·cm.所有薄膜在可见光区的平均透过率均达到了90%以上.
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