IBAD薄膜与基体界面的显微结构

材料研究学报, 1996, 10(2): 187-190.

IBAD薄膜与基体界面的显微结构

清华大学

基金项目: 国家自然科学基金

INVESTIGATION ON MICROSTRUCTURE OF THE INTERFACE BETWEEN IBAD THIN FILMS AND SUBSTRATE

TAO Kun , HE Xiangjun , JIANG Hai , FAN Yudian , LI Hengde(Tsinghua University)Correspondent: (Department of Materials Science and Engineering

Keywords： :ion-beam assisted deposition (IBAD);interface;microstructure , 界面 , 显微结构

采用中能离子束辅助沉积(IBAD)技术,在单晶Al2O3(0001)基片上沉积Mo膜,在GaAS(001)基片12合成Fe16N2薄膜用HREM等研究了Mo膜-Al2O3(0001)、Fe16N2膜-GaAs(001)界面的显微结构结果表明:Mo膜的晶粒呈细小性状或纤维状,晶粒平均尺寸约8nm,Fe16N2薄膜为等轴晶,晶粒平均尺寸约为10nm,在Mo膜-Al2O3(0001)界面及Fe16N2薄膜-GaAs(001)界面处存在厚10～15nm的由基片原子及膜层原子组成的非晶过渡层在过渡层与薄膜界面处存在台阶,增加了薄膜的形核点,薄膜的致密度较高。

Molybdenum film and Fe16N2 thin film were deposited on Al2O3 (0001) and GaAs (001)substrate respectively by ion-beam assisted deposition (IBAD). The microstructure of the interface between the films and substrates were studied on atomic scale by using the

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