Titanium carbide coatings are widely used as various wearresistant material. The hydrogen erosion resistance of TiCC films and the effect of hydrogen participation on TiCC films were studied. Seventyfive percent TiCC films are prepared on stainless steel surface by using ion mixing, where TiCC films are deposited by rf magnetron sputtering followed by argon ion bombardment. The samples are then submitted to hydrogen ion implantation at 12×10-3 Pa. Characterization for the 75% TiCC films was done with SIMS, XRD, AES, and XPS. Secondary ion mass spectroscopy (SIMS) was used to analyze hydrogen concentration variation with depth, XRay diffraction (XRD) was used to identify the phases, and Auger electron spectra (AES) as well as Xray photoelectron spectra (XPS) were used to check the effects of hydrogen on shifts of chemical bonding states of C and Ti in the TiCC films. It is found that TiCC films on stainless steel surface can prevent hydrogen from entering stainless steel.
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