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Titanium carbide coatings are widely used as various wearresistant material. The hydrogen erosion resistance of TiCC films and the effect of hydrogen participation on TiCC films were studied. Seventyfive percent TiCC films are prepared on stainless steel surface by using ion mixing, where TiCC films are deposited by rf magnetron sputtering followed by argon ion bombardment. The samples are then submitted to hydrogen ion implantation at 12×10-3 Pa. Characterization for the 75% TiCC films was done with SIMS, XRD, AES, and XPS. Secondary ion mass spectroscopy (SIMS) was used to analyze hydrogen concentration variation with depth, XRay diffraction (XRD) was used to identify the phases, and Auger electron spectra (AES) as well as Xray photoelectron spectra (XPS) were used to check the effects of hydrogen on shifts of chemical bonding states of C and Ti in the TiCC films. It is found that TiCC films on stainless steel surface can prevent hydrogen from entering stainless steel.

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