通过控制气态环状二聚体原料的裂解温度,在不同裂解温度下合成Parylene C膜,分析了裂解温度对膜的微观组织、拉伸性能和透气性能的影响。研究结果表明,当温度低于600℃时,原料裂解不充分,膜中存在大量未裂解原料的球状聚集体,导致膜的拉伸强度降低,气体透过率较高;当裂解温度达到720℃,气态原料存在部分过度裂解,裂解温度在630℃~690℃时,原料的裂解较充分,而且过裂解程度较小,制备的膜综合性能优异。
In this study,Parylene C films were prepared by polymerization of gas monomers pyrolysised at different temperature.Influence of the pyrolysis temperature on micrographs,tensile strength and gas transmission property of Parylene C film was discussed.The results show that tensile strength decreases and gas transmission increases due to some congeries of dimmers pyrolysised inadequately embedded in films when pyrolysis temperature is less than 600 ℃.Some dimers are pyrolysised overly at 720 ℃.Performance of the films which prepared by gas dimers pyrolysised at 630 ℃～690 ℃ is excellent.
参考文献
| [1] | Yang LJ.;Lin WZ.;Yao TJ.;Tai YC. .Photo-patternable gelatin as protection layers in low-temperature surface micromachinings[J].Sensors and Actuators, A. Physical,2003(1/2):284-290. |
| [2] | Xu CY.;Lemon W.;Liu C. .Design and fabrication of a high-density metal microelectrode array for neural recording[J].Sensors and Actuators, A. Physical,2002(1):78-85. |
| [3] | 吉祥波,鲜晓斌,唐贤臣,帅茂兵,赵宗峰.热处理对Parylene C薄膜性能的影响[J].现代塑料加工应用,2007(04):9-11. |
| [4] | Pruden KG;Beaudoin SP .Model for the photooxidation of parylenes[J].Journal of Polymer Science, Part A. Polymer Chemistry,2004(11):2666-2677. |
| [5] | 吉祥波,唐贤臣,鲜晓斌,帅茂兵,赵宗峰.Parylene C膜的热降解行为[J].化工新型材料,2008(07):36-37,44. |
| [6] | 唐贤臣,鲜晓斌,吉祥波,赵宗峰,陈艳平.沉积压力对Parylene C膜性能的影响[J].化工新型材料,2007(11):47-48. |
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