Changes of surface morphology following XeCl excimer laser irradiation were investigated for three engineering ceramic materials (Al2O3, Al2O3-SiC nanocomposite and Si3N4). Al2O3 and Al2O3-SiC nanocomposite samples exhibit a smooth rapid melt layer on the surface, and the formation of the metastable γ-Al2O3 was observed. A silicon-rich layer on the surface was formed after laser irradiation of Si3N4. The toughness K1c of the materials was measured by the indentation fracture method. After laser irradiation, the toughness of Al2O3, Al2O3-SiC nanocomposite and Si3N4 was improved to various degrees: Al2O3-SiC nanocomposite, 60% (max.); Al2O3, 40% (max.); Si3N4, 12% (max.).
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