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A microfabricated electrical impedance spectroscopy (EIS) chip with microelectrodes was developed. The substrate and the electrodes of the chip were made of glass and gold, respectively. The experimental results demonstrated that the EIS-chip could distinguish different solutions (physiological saline, culture medium, living cell suspension etc.) by scanning from 10Hz to 45kHz. A 6-element circuit model was used for fitting the real part and the imaginary part admittance curves of the living cell suspension. An actual circuit was also built and tested to verify the 6-element circuit model proposed. The micro-EIS chip has several advantages including the use of small sample volumes, high resolution and ease of operation. It shows good application prospects in the areas of cellular electrophysiology, drug screening and bio-sensors etc.

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