在室温下,用对靶磁控溅射法制备了系列类三明治结构C/Co/C颗粒膜.C靶和Co靶分别采用射频溅射和直流对靶溅射模式,并且随后进行了原位退火.用振动样品磁强计(VSM)和扫描探针显微镜(SPM)系统研究了C/Co/C颗粒膜的微结构和磁特性与磁性层厚度、非磁性层厚度、退火温度的关系.X射线衍射(XRD)图样显示出退火400℃的样品具有很好的六角密堆积结构.扫描探针显微镜图样和δM曲线说明Co纳米颗粒嵌在非晶质的C母基内.振动样品磁强计测量表明磁矩很好的排列在膜面内,随着磁性层Co层厚度的增加,矫顽力(Hc)先增大然后减小.在Co层厚度为20nm,C层厚度为30nm,退火温度400℃时,矫顽力达到最大值,剩磁比(S)接近于1.
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