采用固相反应法合成具有焦绿石立方结构的Bi1.5ZnNb1.507(BZN)陶瓷靶材,采用脉冲激光沉积法在Pt/SiO2/Si(100)基片上制备立方BZN薄膜.研究了沉积氧压的变化对薄膜的结晶性能,微观形貌以及介电性能的影响.结果表明:沉积的BZN薄膜都呈现出立方焦绿石单相结构,但是薄膜的取向随氧压变化而变化.当沉积氧压为10Pa时,薄膜的(222)晶面拥有最强的择优取向.随着氧压的升高,BZN薄膜的介电常数明显降低.在10 Pa氧压下沉积的BZN薄膜展示出介电可调特性为5％ (500 kV/cm).
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