研究了自支撑金刚石膜的生长取向特征、表面形貌和质量对断裂强度的影响.X射线衍射和断裂强度的结果表明,随着衍射强度比值I(111)/I(220)的增大,断裂强度呈下降趋势.堆积在晶粒间界处的二次形核生长的小晶粒,覆盖晶粒问界的缝隙,在柱状晶粒间形成类似的搭桥效应,增强柱状晶之间的相互作用能,提高柱状晶结构的抗破断能力,金刚石膜中出现的非金刚石相将降低金刚石厚膜的断裂强.
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