运用溶胶-凝胶法在Si/SiO2/Ti/Pt基底上制备了掺杂不同量的Y3+的单层Ba0.65Sr0.35TiO3 (BST)薄膜和并联结构的BST/ZrO2复合薄膜.研究发现:当BST溶胶中掺入了适量的Y3+后,制备的单层BST的表面形貌得到改善,介电性能提高;掺杂的Y3+为1mol％时单层BST薄膜介电性能最佳,介电常数为400.53;介电损耗为0.0125.BST/ZrO2复合薄膜的电容值相对于单层BST薄膜得到明显提高,当烧结温度为750℃时,BST/ZrO2复合薄膜综合介电性能最佳,介电常数790.12;介电损耗达到0.051.
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