Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films

材料科学技术（英）, 2003, 19(z1): 109-111.

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1.Center of Composite Materials, Harbin Institute of Technology, Harbin 150001, China

2.Center of Composite Materials, Harbin Institute of Technology, Harbin 150001, China

3.Center of Composite Materials, Harbin Institute of Technology, Harbin 150001, China

4.Center of Composite Materials, Harbin Institute of Technology, Harbin 150001, China

5.Center of Composite Materials, Harbin Institute of Technology, Harbin 150001, China

基金项目: National Key Research Plans in "the tenth Five-year"(41312040401)

Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films

Keywords： Tetrahedral amorphous carbon

The microstructure and properties of tetrahedral amorphous carbon (ta-C) films deposited by the filtered cathodic vacuum arc technology has been investigated by visible Raman spectroscopy, AFM and Nano-indentor. The Raman spectra have been fitted with a s

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Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films

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