BaTiO3-x films grown on SrTiO3 substrate at the oxygen pressure of 2 x 10(-5) Pa by laser molecular beam epitaxy result in a tetragonal BaTiO2.52 compound which exhibits metallic behavior in physical properties. Such an oxygen-deficient compound remains in a perovskite-type structure, however, its lattice parameters are larger than those of the stoichiometric BaTiO3. Threading dislocations, which are frequently observed and are believed to undermine electrical properties in stoichiometric BaTiO3 films, are rarely found. Instead, {111} nanotwins are found to be the major microstructural configuration in the present oxygen-deficient films. The mechanism for the defect configuration of these films is discussed on the basis of oxygen deficiency. (c) 2006 Elsevier B.V. All rights reserved.
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