The mean sputter depth depends on the surface composition gradient during ion implantation.For the high fluence ion implantation into a Pt-Cu alloy, the surface composition gradient of Cu is so large that the difference in mean sputter depth between Pt and Cu, is significant. However, for the high fluence ion implantation into 10B-11B isotope mixture, the surface composition gradient of 10B is so small that the difference in mean sputter depth between 10B and 11B is insignificant.
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