利用直流磁控溅射法在玻璃衬底上制备了铝铬共掺杂氧化锌(ZACO)透明导电薄膜.通过X射线衍射(XRD)和扫描电镜(SEM)等表征方法对薄膜特性进行测试分析,研究了溅射压强和溅射功率对薄膜生长速率以及光电特性的影响.结果表明,随着溅射气压(1.5～4.5 Pa)的增大,薄膜沿c轴方向的结晶质量提高,薄膜表面更加致密,晶粒大小更加均匀.薄膜生长率随压强的增大而减小,但电阻率先减小后增大.当溅射功率由80 W增大到100 W时,薄膜的生长速率增大,电阻率减小.溅射压强为3.5 Pa,溅射功率为100 W时,薄膜的电阻率达到最小值2.574×10-3 Ω·cm.紫外-可见透射光谱表明,所有薄膜在可见光区的透过率均超过89.9%.
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