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  4. 超细晶/纳米晶铝膜的研究现状

材料导报, 2007, 21(10): 109-112.

超细晶/纳米晶铝膜的研究现状

杨栋华 1, , 欧信兵 2, , 张津 3,

1.重庆工学院材料科学与工程学院,重庆,400050

2.重庆工学院材料科学与工程学院,重庆,400050

3.重庆工学院材料科学与工程学院,重庆,400050

关键词： 超细晶/纳米晶 , 铝膜 , 制备 , 性能

Research Progress in Ultrafine Grain/Nanocrystalline Al Films

综述了超细晶/纳米晶铝膜的制备技术和制备工艺参数如衬底类型、氩气分压和靶功率等对铝膜结构性能的影响;介绍了目前超细晶/纳米晶铝膜的显微组织、铝薄膜及超薄铝薄膜的研究和其机械性能等研究方面的现状和进展,并展望了超细晶/纳米晶铝膜研究的发展前景.

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