利用溶胶-凝胶法在玻璃基板上制备了Al/Zn原子掺杂比例为0～0.25的掺铝氧化锌(ZnO∶Al或AZO)薄膜,随后分别将其在空气,氧气和氮气3种不同气氛中退火处理,研究了薄膜的光学、电学与结构方面的性质.X射线衍射分析表明AZO薄膜是具有c轴择优取向的六方纤锌矿结构多晶体;通过紫外-可见光分光计测定表明该薄膜在可见光范围内具有>80%的高透过率,随着铝掺杂比例的增大光学能隙增大且吸收边向短波方向移动.
Aluminium-doped zinc oxide (ZnO : AI or AZO)thin films have been deposited on glass substrates by a sol-gel process, followed by annealing in air, oxygen and nitrogen. The electrical, optical and structural proper-ties of AZO thin films have been investigated. X-ray diffraction analysis showed that the AZO films are poly-crystalline with a wurtzite crystal structure. The results prove that the thin films with strongly preferred orien-tation of c-axis perpendicular to the substrate surface. The transmittance spectra of AZO thin films were meas-ured in the wavelength range from 300 to 800nm by a UV-vis spectrometer and the films have high transmit-tance above 80%. The optical band gap is widened with the increasing of A1/Zn molar ratio and the absorptionedge of the transmission curve of the films moves toward short wavelength.
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